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D-11 Invited—Nanoscale Strain Characterization in Microelectronic Materials Using X-ray Diffraction

Published online by Cambridge University Press:  20 May 2016

C. E. Murray
C. E. Murray
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY
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Abstract

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Type
Denver X-Ray Conference
Information
Powder Diffraction , Volume 24 , Special Issue 2 , June 2009 , pp. 169
Copyright
Copyright © Cambridge University Press 2009

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