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F15 Thickness Determination of Copper and Nickel Nanolayers: Comparison of Completely Reference-Free X-ray Fluorescence Analysis and X-ray Reflectometry

Published online by Cambridge University Press:  20 May 2016

M. Kolbe
Affiliation:
Physikalisch-Technische Bundesanstalt, Berlin, Germany
B. Beckhoff
Affiliation:
Physikalisch-Technische Bundesanstalt, Berlin, Germany
M. Krumrey
Affiliation:
Physikalisch-Technische Bundesanstalt, Berlin, Germany
G. Ulm
Affiliation:
Physikalisch-Technische Bundesanstalt, Berlin, Germany

Abstract

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Type
Denver X-Ray Conference
Copyright
Copyright © Cambridge University Press 2005

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