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F-66 Investigation of Spin-Coated Inorganic Contamination on Si Surfaces by Various Analytical Techniques

Published online by Cambridge University Press:  20 May 2016

B. Beckhoff ,
M. Kolbe ,
M. Müller ,
A. Nutsch ,
R. Altmann ,
G. Borionetti ,
C. Pello ,
M. L. Polignano ,
D. Codegoni  and
S. Grasso
...Show all authors
B. Beckhoff
Affiliation:
Physikalisch Technische Bundesanstalt, Berlin, Germany
M. Kolbe
Affiliation:
Physikalisch Technische Bundesanstalt, Berlin, Germany
M. Müller
Affiliation:
Physikalisch Technische Bundesanstalt, Berlin, Germany
A. Nutsch
Affiliation:
Fraunhofer IISB, Erlangen, Germany
R. Altmann
Affiliation:
Fraunhofer IISB, Erlangen, Germany
G. Borionetti
Affiliation:
MEMC Electronic Materials SpA, Novara, Italy
C. Pello
Affiliation:
MEMC Electronic Materials SpA, Novara, Italy
M. L. Polignano
Affiliation:
Numonyx, Via Olivetti, Milan, Italy
D. Codegoni
Affiliation:
Numonyx, Via Olivetti, Milan, Italy
S. Grasso
Affiliation:
Numonyx, Via Olivetti, Milan, Italy
E. Cazzini
Affiliation:
Numonyx, Via Olivetti, Milan, Italy
M. Bersani
Affiliation:
Fondazione Bruno Kessler, Trento, Italy
P. Lazzeri
Affiliation:
Fondazione Bruno Kessler, Trento, Italy
S. Gennaro
Affiliation:
Fondazione Bruno Kessler, Trento, Italy
P. Kregsamer
Affiliation:
Atominstitut, TU Wien, Vienna, Austria
F. Posch
Affiliation:
Atominstitut, TU Wien, Vienna, Austria
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Abstract

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Type
Denver X-Ray Conference
Information
Powder Diffraction , Volume 25 , Issue 2 , June 2010 , pp. 215
Copyright
Copyright © Cambridge University Press 2010

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