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Structural analysis of ZnO thin films obtained by d.c. sputtering and electron beam evaporation

Published online by Cambridge University Press:  06 March 2012

M. E. L. Sabino ,
D. M. Oliveira ,
V. D. Falcão ,
A. C. Bernardes-Silva  and
J. R. T. Branco
M. E. L. Sabino
Affiliation:
Fundação Centro Tecnológico de Minas Gerais (CETEC), Av. José Cândido da Silveira, 2000 – Horto, 30170-000 Belo Horizonte, Minas Gerais, Brazil
D. M. Oliveira
Affiliation:
Fundação Centro Tecnológico de Minas Gerais (CETEC), Av. José Cândido da Silveira, 2000 – Horto, 30170-000 Belo Horizonte, Minas Gerais, Brazil
V. D. Falcão
Affiliation:
Fundação Centro Tecnológico de Minas Gerais (CETEC), Av. José Cândido da Silveira, 2000 – Horto, 30170-000 Belo Horizonte, Minas Gerais, Brazil
A. C. Bernardes-Silva
Affiliation:
Fundação Centro Tecnológico de Minas Gerais (CETEC), Av. José Cândido da Silveira, 2000 – Horto, 30170-000 Belo Horizonte, Minas Gerais, Brazil
J. R. T. Branco
Affiliation:
Fundação Centro Tecnológico de Minas Gerais (CETEC), Av. José Cândido da Silveira, 2000 – Horto, 30170-000 Belo Horizonte, Minas Gerais, Brazil
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Abstract

ZnO thin films were produced by argon plasma assisted electron beam vacuum evaporation and d.c. magnetron sputtering deposition techniques. ZnO films are used in solar cells as transparent contact in heterojunction cells, and can be deposited on a variety of substrates by different techniques, including electron beam deposition and sputtering and laser ablation. ZnO thin films were prepared for photovoltaic applications and the structural properties were studied. The results showed that the sputtering and the vacuum evaporation techniques resulted, respectively, in a textured ZnO and ZnO plus Zn mixed phases. The annealing of the vacuum evaporation ZnO films resulted in films with high crystallinity.

Keywords

ZnO thin filmd.c. sputteringelectron beam evaporationX-ray diffraction
Type
Technical Articles
Information
Powder Diffraction , Volume 23 , Special Issue S1 , March 2008 , pp. S91 - S93
Copyright
Copyright © Cambridge University Press 2008

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