Hostname: page-component-78c5997874-ndw9j Total loading time: 0 Render date: 2024-11-10T14:19:53.195Z Has data issue: false hasContentIssue false
  • English
  • Français

Measuring fracture toughness of coatings using focused-ion-beam-machined microbeams

Published online by Cambridge University Press:  01 February 2005

D. Di Maio  and
S.G. Roberts
D. Di Maio
Affiliation:
Department of Materials, University of Oxford, Oxford OX1 3PH, United Kingdom
S.G. Roberts
Affiliation:
Department of Materials, University of Oxford, Oxford OX1 3PH, United Kingdom
Get access

Abstract

Measuring the toughness of brittle coatings has always been a difficult task. Coatings are often too thin to easily prepare a freestanding sample of a defined geometry to use standard toughness measuring techniques. Using standard indentation techniques gives results influenced by the effect of the substrate. A new technique for measuring the toughness of coatings is described here. A precracked micro-beam was produced using focused ion beam (FIB) machining, then imaged and loaded to fracture using a nanoindenter.

Keywords

CoatingsNanoindentationToughness
Type
Rapid Communications
Information
Journal of Materials Research , Volume 20 , Issue 2 , February 2005 , pp. 299 - 302
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Oliver, W.C. and Pharr, G.M.: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).CrossRefGoogle Scholar
2.Sakai, M. and Bradt, C.: Fracture toughness testing of brittle materials. Int. Mater. Rev. 38, 53 (1993).CrossRefGoogle Scholar
3.Ponton, C.B. and Rawlings, R.D.: Vickers indentation fracture toughness test. Part 1: Review of literature and formulation of standardised indentation toughness equations. Mater. Sci. Technol. 5, 865 (1989).CrossRefGoogle Scholar
4.Warren, P.D.: A simple method for determining K Ic in brittle materials using Hertzian indentation. J. Eur. Ceram. Soc. 15, 385 (1995).CrossRefGoogle Scholar
5.Li, X., Diao, D. and Bhushan, B.: Fracture mechanisms of thin amorphous carbon films in nanoindentation. Acta Mater. 45, 4453 (1997).CrossRefGoogle Scholar
6.Ding, J., Meng, Y. and Wen, S.: Mechanical properties and fracture toughness of multilayer hard coatings using nanoindentation. Thin Solid Films 371, 178 (2000).CrossRefGoogle Scholar
7.Kim, S-R. and Nairn, J.A.: Fracture mechanics of coating/substrate systems. Part I: Analysis of tensile and bending experiments. Eng. Fract. Mech. 65, 573 (2000).CrossRefGoogle Scholar
8.Johansson, S., Schweitz, J-A., Tenerz, L. and Tiren, J.: Fracture testing of silicon microelements in situ in a scanning electron microscope. J. Appl. Phys. 63,4799 (1988).CrossRefGoogle Scholar
9.Sundarajan, S., Bushan, B., Namazu, T. and Isono, Y.: Mechanical property measurements of nanoscale structures using an atomic force microscope. Ultramicroscopy 91, 111 (2002).CrossRefGoogle Scholar
10.Namazu, T., Isono, Y. and Tanaka, T.: Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM. J. Microelectromech. Syst. 9, 450 (2000).CrossRefGoogle Scholar
11.Komai, K., Minoshima, K. and Inoue, S.: Fracture fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation. Microsyst. Technol. 5, 30 (1998).CrossRefGoogle Scholar
12.Son, D., Jeong, J-H. and Kwon, D.: Film-thickness considerations in microcantilever-beam test in measuring mechanical properties of metal thin films. Thin Solid Films 437, 182 (2003).CrossRefGoogle Scholar
13.McCarthy, J., Pei, Z., Becker, M. and Atteridge, D.: FIB micromachined submicron thickness cantilevers for the study of thin film properties. Thin Solid Films 358, 146 (2000).CrossRefGoogle Scholar
14.Minoshima, K., Terada, T. and Komai, K.: Influence of nanometre-sized notch and water on the fracture behaviour of single crystal silicon microelements. Fatigue Fract. Eng. Mater. Struct. 23, 1033 (2000).CrossRefGoogle Scholar
15.Haswell, R., McComb, D.W. and Smith, W.: Preparation of site-specific cross-sections of heterogeneous catalysts prepared by focused-ion-beam milling. J. Microsc. 211, 161 (2003).CrossRefGoogle ScholarPubMed
16.Petersen, K.E.: Silicon as a mechanical material: Proc. IEEE. 70, 420 (1982).CrossRefGoogle Scholar
17.John, C. St.: The brittle-to-ductile transition in pre-cleaved silicon. Philos. Mag. 32, 1194 (1975).CrossRefGoogle Scholar