Biaxial residual stress in a 〈111〉 textured cubic TiN polycrystalline thin film was analyzed by linear least-squares refinement using the method proposed by Yokoyama and Harada [J. Appl. Crystallogr. 42, 185–191 (2009)]. Values of the unstressed (or stress-free) unit-cell parameter a0=4.2332±0.0006 Å and the stress components of σ11=397(88), σ22=401(88), and σ12=−110(100) were obtained. The values of the in-plane stresses σ11 and σ22 presented in the TiN film are practically the same, while σ12 is relatively small. The results obtained in this study confirm that the above theoretical prediction by Yokoyama and Harada can be used to obtain reliable values of stress-free unit-cell parameter and three biaxial stress components of a textured cubic thin film.
