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Microstructure evolution in monocrystalline silicon in cyclic microindentations

Published online by Cambridge University Press:  06 January 2012

I. Zarudi ,
L. C. Zhang  and
M. V. Swain
I. Zarudi
Affiliation:
School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, New South Wales 2006, Australia
L. C. Zhang
Affiliation:
School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, New South Wales 2006, Australia
M. V. Swain
Affiliation:
School of Aerospace, Mechanical and Mechatronic Engineering, Biomaterials Science Research Unit, The University of Sydney, Eveleigh, New South Wales 1430, Australia
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Abstract

The study presents evidence of the microstructural evolution during cyclic indentation of monocrystalline silicon with a spherical indenter. Transmission electron microscopy examination of microindentation on cross-section view samples showed that the structure change in the transformation zone features a decomposition of the amorphous phase to R8/BC8 crystals. Outside the zone, cyclic loading gives rise to bending of pristine silicon, slip penetration, and radial cracking. The development of the load–displacement curves during consecutive indentations is justified in terms of the phase transformation events observed.

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Type
Rapid Communications
Information
Journal of Materials Research , Volume 18 , Issue 4 , April 2003 , pp. 758 - 761
Copyright
Copyright © Materials Research Society 2003

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