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Modification of sol–gel-derived amorphous Al2O3 thin films by F2 excimer laser irradiation at ambient temperature

Published online by Cambridge University Press:  31 January 2011

Satoshi Takeda ,
Yoshiaki Ikuta ,
Masahiro Hirano  and
Hideo Hosono
Satoshi Takeda*
Affiliation:
Research Center, Asahi Glass Co.Ltd, 1150 Hazawa-cho, Kanagawa-ku, Yokohama 221-8755, Japan
Yoshiaki Ikuta
Affiliation:
Transparent ElectroActive Materials Project, ERATO, Japan Science and Technology Corporation, KSP C-1232, Sakato, Takatsu-ku, Kawasaki 213-0012, Japan
Masahiro Hirano
Affiliation:
Transparent ElectroActive Materials Project, ERATO, Japan Science and Technology Corporation, KSP C-1232, Sakato, Takatsu-ku, Kawasaki 213-0012, Japan
Hideo Hosono
Affiliation:
Transparent ElectroActive Materials Project, ERATO, Japan Science and Technology Corporation, KSP C-1232, Sakato, Takatsu-ku, Kawasaki 213-0012, Japan
*
a)Address all correspondence to this author.takeda@agc.co.jp
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Abstract

F2 excimer laser (157 nm) irradiation was applied to modify sol–gel-derived amorphous Al2O3 thin films at ambient temperature. The surface morphology and density of the film were significantly altered by the laser irradiation (power: 2 mW/cm2/pulse). The surface properties of the film were also changed from hydrophilic to hydrophobic. These alterations were not observed when using ArF excimer laser (193 nm) irradiation at the same laser power as that of the F2 laser. It was found that the changes induced by F2 laser irradiation mainly arose from the direct photoexcitation of C = O groups in ethylacetoacetate, which was added as a chelating agent of aluminum-alkoxides. Consequently, photochemical reactions of the Norrish-type occur, resulting in the formation of hydrocarbon or olefin and the elimination of carbon monoxide (CO) or decomposition products. The elimination of CO is considered to cause the marked change in structure and surface properties of the film. Patterning of the gel films was successfully performed by using these findings.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 4 , April 2001 , pp. 1003 - 1009
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

1.Mayer, J.W., Eriksson, L., and Davies, J.A., Ion Implantation in Semiconductors (Academic Press, New York, 1970).Google Scholar
2.McHargue, C.J., Kossowsky, R., and Hofer, W.O. (Eds.), StructureProperty Relationship in Surface-Modified Ceramics (Kluwer Academic, Norwell, MA, 1989) p. 253.CrossRefGoogle Scholar
3.Haglund, R.F. Jr., Mogul, H.C., Weeks, R.A., and Zuhr, R.A., J. Non-Cryst. Solids 130, 326 (1991).CrossRefGoogle Scholar
4.Levine, T.E., Keddie, J.L., Revesz, P., Mayer, J.W., and Giannelis, E.P., J. Am. Ceram. Soc. 76, 1369 (1993).CrossRefGoogle Scholar
5.Imai, H., Yasumori, M., Hirashima, H., Awazu, K., and Onuki, H., J. Appl. Phys. 79, 8304 (1996).CrossRefGoogle Scholar
6.Hosono, H., Kurita, M., and Kawazoe, H., Thin Solid Films 351, 137 (1999).CrossRefGoogle Scholar
7.Dyer, J.R., Applications of Absorption Spectroscopy of Organic Compounds, (Prentice-Hall, Englewood Cliffs, NJ, 1965).Google Scholar
8.Peters, D., Trans. Faraday. Soc. 59, 1121 (1963).CrossRefGoogle Scholar
9.Norrish, R.G.W. and Porter, G., Nature 164, 658 (1949).CrossRefGoogle Scholar
10.Sanchez, C., Livage, J., Henry, M., and Babonneau, F., J. Non-Cryst. Solids 100, 65 (1988).CrossRefGoogle Scholar
11.Nass, R. and Schmidt, H., J. Non-Cryst. Solids 121, 329 (1990).CrossRefGoogle Scholar
12.Hosono, H., Mizuguchi, M., Kawazoe, H., and Ogawa, T., Appl. Phys. Lett. 74, 2755 (1999).CrossRefGoogle Scholar
13.Mizuguchi, M., Skuja, L., Hosono, H., and Ogawa, T., Optics Lett. 24, 863 (1999).CrossRefGoogle Scholar
14.Ikuta, Y., Kikugawa, S., Matsui, M., Shimodaira, N., Yoshizawa, S., and Hirano, M., Proc. SPIE 3676, 827 (1999).CrossRefGoogle Scholar
15.Wagner, C.D., Riggs, W.M., Davis, L.E., Moulder, J.F., and Muilenberg, G.E., Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer, Minneapolis, 1979)Google Scholar
16.Babonneau, F., Coury, L., and Livage, J., J. Non-Cryst. Solids 121, 153 (1990).CrossRefGoogle Scholar
17.Jain, R., Rai, A.K., and Mehrotra, R.C., Polyhedron 5, 1017 (1986).CrossRefGoogle Scholar
18.Zhao, G. and Tohge, N., Jpn. J. Poly. Sci. Technol. 53, 253 (1995) (in Japanese).Google Scholar
19.Shirai, M., Shinozuka, T., and Tsunooka, M., Polymer preprints, Japan vol. 49, No. 2, p. 191 (2000) (in Japanese).Google Scholar
20.Takeda, S., Fukawa, M., Hayashi, H., and Matsumoto, K., Thin Solid Films 339, 220 (1999).CrossRefGoogle Scholar
21.Takeda, S., Yamamoto, K., Hayasaka, Y., and Matsumoto, K., J. Non-Cryst. Solids 249, 41 (1999).CrossRefGoogle Scholar
22.Wenzel, R.W., Ind. Eng. Chem. 55, 18 (1963).Google Scholar