Scanning probe microscopy (SPM) is unique among the imaging
techniques in which it provides three-dimensional (3-D) real-space
images and among surface analysis techniques in which it allows
spatially localized measurements of structure and properties. Under
optimum conditions, subatomic spatial resolution is achieved. The
development given has not been only because of its ability to obtain
topographic and structural images of the surface at micro and nano
scale, but also for the possibility of performing analysis of
superficial properties such as local adhesion properties, chemical
heterogeneity, and local mechanical properties [1]. The SPM has
different variations depending on the interaction between the tip and
the sample surface, such as AFM, which has the ability of showing
topographic characteristics at atomic scale, LFM, which measures local
friction differences, FMM and PDM that measure differences of local
elasticity. The instrument counts with the spectroscopy mode and with
this it is possible to obtain Force — distance (F-d) curves that give
information about the local elastic properties of the sample surface. In
this work, TiN and ZrN thin films grown by the PAPVD by pulsed arc
technique were studied, using the AFM, LFM, FMM, PDM and spectroscopy F
vs. d techniques.