For quantitative electron probe analysis, the raw intensity ratios must be corrected to take into account deviations due to absorption, fluoresecnce and electron beam penetration. The major correction is usually the absorption correction, so that for best results, accurate mass absorption coefficients are required. Many tables of absorption coefficients are calculated by interpolation or extrapolation from available measured values, and therefore new measurements are required for increased reliability. The region which requires the most attention for present-day probe analysis is the 2 to 10 Å range.
Thin foils of the lighter metals are available for mass absorption coefficient measurements, but heavy metal foils, which must be extremely thin, are not obtainable, A method has been developed to prepare thin films of heavy metals on a suitable substrate by pyrolytic decomposition of metal organic compounds.